SIMON FRASER UNIVERSITY S.92-64

SIMON FRASER UNIVERSITY

S.92-64

OFFICE OF THE VICE-PRESIDENT, ACADEMIC

MEMORANDUM

To:

Senate

From:

J.M. Munro, Chair, Senate Committee on Academic Planning

Subject:

Institute of Micromachine and Microfabrication Research

Date:

19 November, 1992

At its meeting on November 4, 1992, the Senate Committee on Academic Planning

recommended the establishment of the Institute of Micromachine and Microfabrication

Research.

Motion: That Senate approve and recommend

to the Board of Governors the

establishment of the Institute of Micromachine and Microfabrication

Research and the granting of a Charter to the Institute under the terms

of Policy R.40.O1.

Enclosure

PROPOSAL FOR AN INSTITUTE OF

MTCROMACIIINE AND MICROFABRICATION RESEARCH

The proposed Institute will stimulate, encourage, and enhance micromachining and

microfabrication research, by providing a focus and resource base, for collaborative and

multidisciplinary research, leading to new processes and new devices of benefit across a wide

array of disciplines.

The Institute will be a schedule A centre. The administrative officer will be the Dean of Applied

Sciences.

The Director of the Institute, nominated, elected, and recommended by members of the Institute

through the Dean of Applied Sciences, will be a full time employee of Simon Fraser University,

appointed by the President, upon recommendation of the Governing Committee for Centres. The

term of the Director will be for three years, renewable.

The Director shall submit an annual report on all Institute activities, and a financial statement

showing all revenues and expenditures; for the twelve (12) months ending March 31 of each year,

no later than June 30 of each year.

The Institute will act in accordance with all university policies, and in a manner consistent with the

goals and objectives of Simon Fraser University.

. Membership shall be by application to the Director, and a majority vote of the membership, subject

to appeal (for Simon Fraser University personnel only). Membership shall be for a three (3) year

term, renewable at the discretion of the Director.

An Advisory Board representing a cross section of university administration, research, industry,

and government personnel, will be assembled to provide guidance to the Institute.

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OBJECTIVES

Consistent with the goals and objectives of Simon Fraser University, the particular objectives of

the Institute are as follows:

To stimulate, encourage, and enhance micromachining and microfabrication research and

development, by providing a focus and resource base for such collaborative and multi-disciplinary

research.

To identify and articulate priorities for the application of micromachining, which will bring the

greatest benefit through scientific research, and the creation of devices to aid human health, safety,

and comfort with the minimum use of resources.

To create a research network within Canada and foster co-operation with major institutions

around the world.

To establish an advanced micromachining and microfabrication process facility at SFU.

To promote the development of future research and development personnel with expertise in

micromachining and microfabrication through a graduate program, prepared in conjunction with

appropriate departments.

To promote the dissemination of knowledge in the broader community through short courses

and seminars in cooperation with Continuing Education, and the provision of consulting services

to industry.

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* At least twice a year, the Director calls a meeting of the membership to discuss policy and

direction of the Institute, and any other concerns of general import.

Members

* Membership shall be by application to the Director, and a majority vote of the membership,

subject to appeal (for Simon Fraser University personnel only) to the Administrative

Officer, whose decision shall be final.

* Membership shall be for a three (3) year term, renewable at the discretion of the Director.

* The Institute shall encourage the widest possible membership of qualified researchers, to

promote the application of micromachining and microfabrication techniques in as many

fields as possible, and to encourage the cross-fertilization of ideas.

* Any member may withdraw from the Institute by delivering a written letter of resignation to

the Director of the Institute.

4. Advisory Board

* The members of the Advisory Board represent a cross section of university administration,

research, industry, and government personnel assembled to provide guidance to the

Institute.

* The primary task of the Advisory Board is to help the Institute grow in size and scope,

while remaining committed to its mission.

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* All Advisory Board meetings are open, and Institute members are encouraged to attend.

* Advisory Board membership shall consist of: the Administrative Officer, the Institute

Director, the Dean of Applied Sciences, two corporate members, two external researchers,

one provincial government representative, one federal government representative, and such

others as may be deemed capable of making an exceptional contribution to the activities of

the Board.

* Invitations for membership are issued at the sole discretion of the Institute Director, except

for those positions specifically designated for Simon Fraser personnel.

* Membership is for a three (3) year renewable term, except for designated personnel.

* The Advisory Board bears no legal responsibility for the actions of the Institute, and

exercises no direct control over the actions of the Director, Institute members, or staff.

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companies have until recently been restricted in another way. As a matter of necessity in smaller

. companies and policy in larger companies, micromachined devices had to prove their economic

value in a particular existing application before venturing into new realms was allowed. Second,

micromachining was a new technology applied by existing businesses with previously defined

markets. Only recently have companies such as Motorola, making a profit from micromachined

automotive devices, decided to explore other markets for possible applications.

Despite the widespread publicity for micromachines in the media, there is still little understanding

of the potential of micromachining technology outside of select industries and research groups.

This statement applies more to North America than the other major regions at present. Therefore

micromachine research specialists, particularly in North America, will have to take the initiative in

reaching out to researchers in other fields, until their capability becomes better known.

THE MARKET

There may be some puzzlement as to why a university based research institute should be concerned

about the demand for its specialized expertise, or possible competitive pressure from other

institutions, but the Institute of Micromachine and Microfabrication Research must face reality.

Both government agencies and corporations base their funding decisions on perceived needs and

priorities arising from those needs. The funding required for growth will come only if the Institute

is seen as offering a unique service to fulfill an unmet need. The Institute must show that it will

undertake research of scientific merit that will give Canada a leading position in a important

technology, not being provided by any other Canadian institution.

Research is occurring throughout the world in micromachine technology, in universities, institutes,

and corporations. Some specialize to a degree in particular applications, or particular research

topics. Corporations are much more likely to be application specific, academic institutions tend to

focus on the research topics of interest to individual professors, which fluctuate over time. The

existing research group at Simon Fraser has expertise in a variety of areas, such as using standard

CMOS processing technology and in wafer scale integration, but does not have the depth of

personnel, or the facilities to claim and hold supremacy in a particular technological niche. Even

attempting to do so has dubious value in a research field rich with unexplored possibilities.

An enduring institution must have a defining characteristic which transcends any particular research

topic of the moment. Micromachine technology is fundamental and rich enough to endure, and

some institutions can and do devote themselves to staying on the leading edge of development

across the broadening spectrum of micromachine research. Such a goal requires a state of the art

facility, a large staff, and a substantial budget. Luxuries that the Institute of Micromachine and

Microfabrication Research will not have for some years. This problem is common in Canada, and

has engendered a distinctive Canadian solution, the network of excellence. This idea has an

exceptional relevance for micromachining, and far more than compensating for a lack, will give a

rare strength to the Institute.

Research in micromachining creates tools for the microscopic machine shop and trains machinists

in their use. Researchers bring their own ideas on potential devices, depending on their

backgrounds and other research interests, but inevitably these represent a very small fraction of the

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potentially valuable devices. When Institute members collaborate with researchers from differing

backgrounds significant advances can occur in each field. For example, micromachined devices are

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organizing the Institute.

All

subsequent funding for the Institute, which is incremental to existing

. levels of support, should come from sources outside Simon Fraser University. The exception

being the normal internal applications for funding to which all personnel, groups of personnel, and

institutes are entitled to apply.