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S.93-30

SIMON FRASER UNIVERSITY

Office of

the Vice-President, Academic ?

MEMORANDUM

To: ?

Senate ?

From:

J. M. Munro

Chair, Senate Committee

on Academic Planning

Subject: ?

School of Engineering Science -

Date:

April 14, 1993

New course

(SCAP 93-12)

Action undertaken by the Senate Committee on Academic Planning and the Senate

Graduate Studies Committee gives rise to the following motion:

Motion: ?

"that Senate approve and recommend approval to the Board of Governors,

as set forth in S.93 -30 the following new course

ENSC 854-3 ?

Integrated Microsensors and Actuators."

J\d2JJtUtAO

SCAP 9312

SIMON FRASER UNIVERSITY

MEMORANDUM

To: Alison Watt, Secretary ?

From: K. Mezei, Acting Dean

Senate Committee on Academic Planning

Graduate Studies

Subject: New Graduate Course, ENSC

854-3

Date: March 9, 1993

The new graduate course, Ensc

854-3

was approved by

the Senate Graduate Studies Committee, at its Meeting on

March 8, 1993, and is now being fowarded to the Senate

Committee on Academic Planning for approval.

K. Mezei, Acting Dean

SIMON FRASER UNIVERSITY ?

SCHOOL OF ENGINEERING SCIENCE ?

MEMORANDUM

To: ?

Dr. Bruce Clayman

Dean of Graduate Studies

From: ?

Dr. John D. Jones

Graduate Program Chairman

Date: ?

11 February 1993

Re: ?

New course ENSC

854 -

Integrated Microsensors and Actuators

Please find enclosed a positive response from Ralph Stanton (Collections Libraian) for our new

course ENSC

854 "

Integrated Micro sensors and Actuators, which was approved from the

Faculty of Applied Science Graduate Studies Committee on December 1, 1992.

RB1UGfl'TE\DGS'MEM0.DEA

New Graduate Course Pro

posal Form

*CALENDAR INFORMATION:

Department:

School of Engineering Science

Title:

Integrated Microsensors and Actuators

Description: see attached

Credit Hours:

Vector:

3-0-1

Course Number:

ENSC 854

Prerequisite:

ENSC 453, 370, 495 or permission of instructor

ENROLLMENT AND SCHEDULING:

Estimated Enrollment: 5

When will the course first be offered: Fall 1993

How often will the course be offered:

Once a year or upon sufficient demand

JUSTIFICATION:

There are 5 faculty members in ENSC and 2 faculty members in Physics involved with the micromachining and sensor

research. It is essential to have a graduate course to provide the students with the basics of sensors and actuators, their

fabrications and applications. Further, this course will provide the students with a hands-on experience of micromachining

technology.

RESOURCES:

Which Faculty member will normally teach the course:

M. Parameswaran (Ash)

What are the budgetary implications of mounting the course: appended

Are there sufficient Library resources (append details): appended

Appended: ?

Outline of the Course

b) ?

An indication of the competence of the Faculty member to give the course.

C) ?

Library resources

Approved: ?

Departmental Graduate Studies Committee:

2L_ ?

Date: ?

i'i'-

Faculty Graduate Studies Committee:

_______________ Date:

Senate Graduate Studies Committee: ?

Ror

INTEGRATED MICROSENSORS AND ACTUATORS

CALENDAR

Microelectronic

DESCRIPTION:

transducer

principles, classification, fabrication and application areas.

Silicon micromachining and its application to integrated microelectronic sensors and actuators.

CMOS compatible micromachining. Static, dynamic and kinematic microactuator fabrication.

Integrated transducer system design and applications. Students will be required to complete a

micromachining project in the microfabrication lab at ENSC.

OUTLINE:

This graduate course provides an indepth look into transduction mechanisms with specific

emphasis on the fabrication of integrated microsensors and actuators. Starting from the

fundamental transduction principles for electrical, thermal, mechanical, magnetic, radiation and

chemical signals, the course will lead into the fabrication of microsensors. Semiconductor

transducers, specifically Silicon-based devices will be described. On-chip circuit integration,

standard IC process compatibility and system realization will follow. Silicon micromachining

concepts and the fabrication of static, dynamic and kinematic structures and their applications to

sensors, actuators and resonators will be taught.

Laboratory Sessions will be conducted along with the lectures providing the students with

experience in simple micromachining experiments. Depending on the process and equipment that

would be functional in the clean-room, a group project on fabricating a simple sensor or actuator

will be made mandatory.

Main instructor: ?

M. Parameswaran (Ash)

Others: ?

G. Chapman, A. Rawicz

Prerequisites: Ensc

453,

370 / 495 or permission of instructor

OBJECTIVE:

This graduate course aims at teaching the students the fundamentals of

fabricating transducers, with the emphasis on realizing the integrated systems applicable to areas

ranging from measurement and control to bio-medical instrumentation. Along with the classical

transducer principles, state of the art technology which is capable of realizing smart sensors and

actuators will be taught. The laboratory session will complement the lecture in providing the

students with hands-on knowledge on microsensor fabrication.

TEXT

Primary text:

"Silicon Sensors" by Middelhoek and Audet, Academic Press, 1990.

"Sensors: A Comprehensive Survey", edited by W. Gopel, J. Hesse and J. N. Zernel,

VCH, 1989.

"Chemical Sensing with Solid State Devices", R. Morrison and M. Madou, Academic

Press, 1989.

"Microsensors", edited by R.S. Muller, R.T. Howe, S.D. Senturia, R.L.Smith and

R.M.White, IEEE Press, 1990.

Sensors and Actuators, Elsevier Sequoia

Sensors and Materials, MYU Publishing, Japan

IEEE Transactions on Electron Devices, IEEE Press.

COURSE SCHEDULE

Transducer fundamentals -

Transduction mechanisms -

weeks

Mechanical, Magnetic, Electrical, Thermal

Radiation and Chemical Sensors

Electrostatic, piezoelectric and thermal actuators

Transducer technology -

4 weeks

Microelectronic fabrication process*

Silicon sensors

S ?

Basic crystallography and

orthographic projection principles

Silicon micromachining

Static, dynamic and kinematic structures

Integrated transducers -

2 weeks

Circuit and device integration

Basic conversion circuits

IC process compatibility

Systems and applications -

Calibration standards

* Just the basics of microelectronic fabrication processes.

Budgetary implications:

Additional resources required:

One of the research assistants in the micromachining group will

assist in lab classes. If the research assistant is not available the we

would like to request a T/A.

Library: ?

$500 for reserve copies of the course and supplementary texts

S ?

Audio visual: ?

Whatever available for the standard class teaching

for wafers, etchants and lab supplies

SIMON FRASER UNIVERSITY

SCHOOL OF ENGINEERING SCIENCE

MEMORANDUM

To: ?

Ralph Stanton

Collections Librarian

Integrated Microsensors and Actuators

Thank you for your memo dated December 21, 1992 regarding the above-mentioned course

proposal and your positive response. Please find enclosed the information your were missing:

number of hours, number of students, and date of offering.

Thank you for your support.

Head Collections Management

.

? MEMO 

TO: ? 

Dr. John D. Jones, Graduate Chairman, School of 

Engineering Science 

FROM: Ralph Stanton (Collections Librarian) 

RE: ? 

ENSC 854 - Integrated Microsensors and Actuators 

(Memo of December 2, 1992) 

DATE: 21/12/92 

I have examined the Library's holdings in subject areas 

supporting ENSC 854. The supporting documentation does not 

indicate: number of hours, number of students, or when 

offered. There is a short bibliography which includes the 

text, three monographs and three periodicals. The Library 

holds all but two items; the latest edition of the text and 

Microsensors. 

The average price of titles in this classification is $79.00 

The Library's holdings in the subjects: Actuators, 

Transducers, Integrated Circuits, Microprocessors, and 

.5icroe1ectronics 

are a 

ll .;reater than those of the 

University of Victoria 

cind

close to or better than those o 

W ?

-:he University of British Columbia. Our holdings 

are

substantially inferior to those of the University of 

Waterloo. 

Our holdings were compared to those of 37 other libraries of 

a similar size in three classification numbers; QA 76.5, TK 

7874, and TK 7895. Our holdings range from equal to or 

substantially better than our peer group. In the broader 

classification range QA and TK our holdings are 

substantially better than our peer group. 

The monograph, periodical and index collection is adequate 

to support this course. The documentation asks for $500 for 

"reference" copies of the course and supplementary text. 

Given that all copies of the text and supplemental readings 

were on loan from the library on December 21 we agree; if we 

can. change the word 

reference 

to

reserve. 

Total cost for 

library materials is $500. There is no need to add to the 

Library base budget since the Collection Profile adequately 

supports this field of study. 

Regards, 

RYTh 

c.c. Sharon Thomas, Head Collections Management 